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Scanning Probe Microscopy has emerged as one of the premier techniques to characterize surfaces. This course will give an overview of the family of SPM techniques including scanning tunneling microscopy (STM), atomic force microscopy (AFM), scanning near field optical microscopy (SNOM) and Kelvin probe microscopy. In each of these applications, the theory of operation, measurement and imaging techniques, and experimental limitations will be discussed. Also listed as EN.510.412