Advanced Topics in Microsytem Fabrication
4.0
creditsAverage Course Rating
Graduate-level course on topics that relate to microsystem integration of complex functional units across different physical scales from nano to micro and macro. Course comprises of laboratory work and accompanying lectures that cover silicon oxidation, aluminum evaporation, photoresist deposition, photolithography, plating, etching, packaging, design and analysis CAD tools, and foundry services. Topics will include emerging fabrication technologies, micro-electromechanical systems, nanolithography, nanotechnology, soft lithography, self-assembly, and soft materials. Discussion will also include biological systems as models of microsystem integration and functional complexity. Perm. Required.