3.0

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Over half a century after its formal birth, scanning electron microscope (SEM) has now become a routine instrument that is employed in physical and biological sciences, manufacturing engineering, archeology, forensic science, and more broader fields. SEM typically work as a superb magnifier but actually far beyond that. When a focused electron beam scans over a sample, a variety of signals arise and bring forth information about surface topography, element composition, crystallographic orientation, electronic bands, and so on, all of which can be imaged with micron to sub-nanometer resolution. Recent integration with in situ measurement tools and Focused Ion Beam system further transform SEM into a powerful platform of materials characterization and fabrication. This course is intended as a guidebook for junior scientists and engineers in all fields who have been or will be a SEM user. The basic science and practical experience covered in this course will help them understand what can be achieved from and how to make the best use of the versatile instrument.